Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope
نویسندگان
چکیده
interconnections using laser terahertz emission microscope Masatsugu Yamashita, Chiko Otani, Kodo Kawase, Toru Matsumoto, Kiyoshi Nikawa, Sunmi Kim, Hironaru Murakami, and Masayoshi Tonouchi RIKEN, 519-1399 Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-845, Japan Nagoya University, Furocho, Chikusa, Nagoya 464-8603, Japan Hamamatsu Photonics, 812 Joko-cho, Higashi-ku, Hamamatsu, Shizuoka 431-3196, Japan NEC Electronics, 1753, Shimonumabe, Nakahara, Kawasaki 211-8668, Japan Osaka University, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan
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تاریخ انتشار 2009